Norio Taniguchi, editor "Nanotechnology," Oxford University Press, Oxford, UK, 2003.
MEMS:
· Joseph McGeough, editor "Micromachining of Engineering Materials," Marcel Dekker, Inc., New York, 2002.
· Marc Madou, "Fundamentals of Microfabrication: The science of miniaturization," CRC Press, LLC, 2002.
· Nadim Maluf, "An Introduction to Microelectromechanical Systems Engineering," Artech House, Boston, 2000.
· Stephen D. Senturia, "Microsystems Design," Kluwer Academic Publishers, New York, November 2000
Book Resources On Applications of Nanotechnology
Nanofuture: What's Next For Nanotechnology by J. Storrs Hall
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